SiCarrier bets on DUV for 5nm chips as SMIC’s yield stalls at one-third of TSMC’s

As US export controls tighten on advanced semiconductor technologies, Shenzhen-based SiCarrier unveiled new 5nm-capable fabrication tools at SEMICON China 2025. The company claims its proprietary deep ultraviolet (DUV) and non-optical process equipment can manufacture 5nm chips without relying on ASML’s extreme ultraviolet (EUV) lithography systems.

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